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Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometry

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Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometry


Published 1963
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Journal of Research of the National Bureau of Standards


Volume 67A
Publisher National Bureau of Standards
Language English
Collection NISTJournalofResearch; NISTresearchlibrary; fedlink

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